Measurements of the intensity oscillation phase of reflection high-ene
rgy electron diffraction during molecular beam epitaxy growth of GaAs
and AlAs indicate that the oscillations are due to an interference eff
ect within the surface reconstruction layer forming on the growing lay
er. The experimental results along a low-symmetry azimuth are explaine
d by a basic theoretical model using only the layer thickness as a fit
ting parameter. Our conclusions are supported by energy loss measureme
nts showing the absence of diffuse inelastic contributions with a diff
erent phase.