The silicon-aluminium bimetal effect has been used to actuate a thin m
embrane, similar to the ones used in silicon pressure sensors. The exp
erimental results are presented for different dimensions of the struct
ure. It is shown that, contrary to the formulas given in some papers,
it is not only the bimetal effect which must be taken into considerati
on for evaluating the behaviour of such a structure. Thermal expansion
of the membrane against the fixed walls is equally important, being a
ble to change considerably the result of this thermal actuation. (C) 1
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