ON THE MECHANISMS IN THERMALLY ACTUATED COMPOSITE DIAPHRAGMS

The silicon-aluminium bimetal effect has been used to actuate a thin m embrane, similar to the ones used in silicon pressure sensors. The exp erimental results are presented for different dimensions of the struct ure. It is shown that, contrary to the formulas given in some papers, it is not only the bimetal effect which must be taken into considerati on for evaluating the behaviour of such a structure. Thermal expansion of the membrane against the fixed walls is equally important, being a ble to change considerably the result of this thermal actuation. (C) 1 998 Elsevier Science S.A. All rights reserved.