ELECTROSTATICALLY DEFLECTABLE POLYSILICON MICROMIRRORS - DYNAMIC BEHAVIOR AND COMPARISON WITH THE RESULTS FROM FEM MODELING WITH ANSYS

Authors
FISCHER M GIOUSOUF M SCHAEPPERLE J EICHNER D WEINMANN M VONMUNCH W ASSMUS F
Citation
M. Fischer et al., ELECTROSTATICALLY DEFLECTABLE POLYSILICON MICROMIRRORS - DYNAMIC BEHAVIOR AND COMPARISON WITH THE RESULTS FROM FEM MODELING WITH ANSYS, Sensors and actuators. A, Physical, 67(1-3), 1998, pp. 89-95
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
67
Issue
1-3
Year of publication
1998
Pages
89 - 95
Database
ISI
SICI code
0924-4247(1998)67:1-3<89:EDPM-D>2.0.ZU;2-5
Abstract
This paper describes the behaviour of electrostatically deflectable po lysilicon torsional micromirrors. The electrostatic behaviour is compu ted by coupling of mechanical and electrostatic calculations using the FEM program ANSYS. Dynamic deflection measurements on a realized micr omirror confirm the results of the simulation. In addition, the dynami c damping behaviour of a polysilicon torsional micromirror is investig ated. The pressure dependence of the operation of micromirrors is meas ured and a comparison with the theory of gas damping is presented. (C) 1998 Elsevier Science S.A. All rights reserved.