Granular metal films with nanocrystalline to amorphous structure are o
f great interest for applications in the field of miniature sensors. T
hese materials exhibit important changes in their physical properties
when the volume fraction of metal decreases under a critical value, kn
own as the percolation threshold. This paper presents some results con
cerning the galvanomagnetic properties and electrical conductivity of
Ni-SiO2 granular thin films. These properties have been investigated f
or films with metal contents between 40 and 60% and they reflect the m
etal-insulator transition. The films are prepared by r.f. sputtering i
n Ar atmosphere (p similar to 1 Pa), using composed targets. The Hall
measurements are made at room temperature, for magnetic-field inductio
n values up to 2 T. The results of the resistivity and Hall voltage me
asurements and their dependence on the metal content in films reflect
the metal-insulator transition. The changes of the resistivity and mag
netic behaviour of Ni-SiO2 granular films, near the percolation thresh
old, make these films interesting for the field of thin-film sensors(t
emperature sensors, Hall sensors). (C) 1998 Elsevier Science S.A. All
rights reserved.