OXIDIZED POROUS SILICON - A NEW APPROACH IN SUPPORT THERMAL ISOLATIONOF THERMOPILE-BASED BIOSENSORS

Authors
LYSENKO V ROUSSEL P DELHOMME G ROSSOKHATY V STRIKHA V DITTMAR A BARBIER D JAFFREZICRENAULT N MARTELET C
Citation
V. Lysenko et al., OXIDIZED POROUS SILICON - A NEW APPROACH IN SUPPORT THERMAL ISOLATIONOF THERMOPILE-BASED BIOSENSORS, Sensors and actuators. A, Physical, 67(1-3), 1998, pp. 205-210
Citations number
12
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
67
Issue
1-3
Year of publication
1998
Pages
205 - 210
Database
ISI
SICI code
0924-4247(1998)67:1-3<205:OPS-AN>2.0.ZU;2-R
Abstract
Any thermal biosensor based on an integrated thermopile dealing with s mall temperature-difference measurements needs a strong support therma l isolation to ensure high measurement sensitivity. The utilization of oxidized porous: silicon for the necessary thermal isolation is a new very attractive approach in thermal biosensor design. The results of modelling of different support structures by means of a finite-element simulation software (ANSYS 5.3) are described. Support parameters of the biosensor are determined to be optimized. (C) 1998 Elsevier Scienc e S.A. All rights reserved.