MEASUREMENT OF MICROMECHANICAL PROPERTIES OF POLYSILICON MICROSTRUCTURES WITH AN ATOMIC-FORCE MICROSCOPE

Authors
SERRE C GOROSTIZA P PEREZRODRIGUEZ A SANZ F MORANTE JR
Citation
C. Serre et al., MEASUREMENT OF MICROMECHANICAL PROPERTIES OF POLYSILICON MICROSTRUCTURES WITH AN ATOMIC-FORCE MICROSCOPE, Sensors and actuators. A, Physical, 67(1-3), 1998, pp. 215-219
Citations number
18
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
67
Issue
1-3
Year of publication
1998
Pages
215 - 219
Database
ISI
SICI code
0924-4247(1998)67:1-3<215:MOMPOP>2.0.ZU;2-B
Abstract
A novel, straightforward and convenient method for measurement of micr omechanical properties by beam bending using an atomic force microscop e in contact mode is presented. This method combines a very high load resolution with a nanometric precision in the determination of the can tilever deflection, thus allowing accurate measurements to be made. Fi rst results applied to the determination of the Young's modulus of pol ysilicon cantilever beams are presented. (C) 1998 Elsevier Science S.A . All rights reserved.