DYNAMICAL ZONE-AXIS ELECTRON-DIFFRACTION CONTRAST OF BORON-DOPED SI MULTILAYERS

Authors
ROSSOUW CJ SPELLWARD P PEROVIC DD CHERNS D
Citation
Cj. Rossouw et al., DYNAMICAL ZONE-AXIS ELECTRON-DIFFRACTION CONTRAST OF BORON-DOPED SI MULTILAYERS, Philosophical magazine. A. Physics of condensed matter. Defects and mechanical properties, 69(2), 1994, pp. 255-265
Citations number
19
Categorie Soggetti
Physics, Applied
Journal title
Philosophical magazine. A. Physics of condensed matter. Defects and mechanical properties → ACNP
ISSN journal
01418610
Volume
69
Issue
2
Year of publication
1994
Pages
255 - 265
Database
ISI
SICI code
0141-8610(1994)69:2<255:DZECOB>2.0.ZU;2-U
Abstract
Thickness extinction fringe profiles are analysed under zone-axis diff raction conditions to characterize strain in Si/SiB multilayers. For t he exact [110] zone-axis orientation, three branches of the dispersion surface dominate the 250 keV electron wavefunction, leading to a simp lified analysis. Thickness fringe extinction periodicities and shifts associated with strains are interpretable in terms of two dominant int erbranch extinction distances.