X-RAY DIFFUSE-SCATTERING BY MULTILAYER WAVE-GUIDE STRUCTURES

X-ray diffuse scattering by a four-layer waveguide-type heterostructur e is studied. The resonant enhancement of diffuse scattering due to th e dynamic diffraction effects has been observed experimentally. It is shown that this phenomenon occurs in both cases when the incident or s cattered waves are subject to the condition of waveguide mode excitati on. Specific features of the waveguide mode excitation have been inves tigated. It is demonstrated that the methods of x-ray diffuse scatteri ng can be effectively used to precisely determine the statistical para meters of roughness for internal and external interfaces. Processing t he diffuse scattering and the specular reflection spectra provides inf ormation on the average distribution of electron density, the root-mea n-square height, and the longitudinal and transversal correlation leng ths of interface roughness. The obtained results are in good agreement with theoretical predictions and calculations.