ON THE CALIBRATION OF MULTICOMPONENT MICROFORCE SENSORS

Authors
JIN WL MOTE CD
Citation
Wl. Jin et Cd. Mote, ON THE CALIBRATION OF MULTICOMPONENT MICROFORCE SENSORS, Journal of microelectromechanical systems, 7(2), 1998, pp. 156-163
Citations number
19
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
Journal title
Journal of microelectromechanical systems → ACNP
ISSN journal
10577157
Volume
7
Issue
2
Year of publication
1998
Pages
156 - 163
Database
ISI
SICI code
1057-7157(1998)7:2<156:OTCOMM>2.0.ZU;2-F
Abstract
A calibration method for multicomponent micro-force sensors using Lore ntz forces is proposed. The method permits generation of six force and moment components in three orthogonal directions on two-dimensional ( 2-D) structures that can be fabricated through existing silicon microm achining technology. Two multicomponent microforce sensor and calibrat ion devices were developed and tested to verify the method.