THE PHYSICS OF METROLOGY INSTRUMENTS

Authors
DAVIDSON M VLADAR AE
Citation
M. Davidson et Ae. Vladar, THE PHYSICS OF METROLOGY INSTRUMENTS, Solid state technology, 41(6), 1998, pp. 135
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
41
Issue
6
Year of publication
1998
Database
ISI
SICI code
0038-111X(1998)41:6<135:TPOMI>2.0.ZU;2-V
Abstract
Metrology is growing in both complexity and breadth, as more technolog ies are brought to bear on the increasingly difficult problems faced b y the process engineer. As IC parts shrink, metrologists are being pus hed into the quantum domain. This article reviews the tools available for CD and overlay metrology.