Software-driven simulation is a valuable tool for those evaluating and
choosing automated material handling systems (AMHS) for new wafer fab
rication facilities. While this approach is just a simulation, it prov
ides more valuable data on possible real performance than just making
decisions from comparative lists of specifications. With AMHS adding $
75-100 million in hardware, software, and infrastructure to the cost o
f a new fab, but being essential for emerging 300-mm fabs, use of simu
lation is crucially important to help sort through management, enginee
ring, and production questions. Simulation provides the ability to com
pare fab automation designs through detailed analyses of system compon
ent layouts, system performance, capacity constraints, wafer run rates
, operational requirements, downtime parameters, automation needs, and
the integration of all these elements.