SOFT SIMULATION CRUCIAL FOR NEW AUTOMATED FAB DECISIONS

Software-driven simulation is a valuable tool for those evaluating and choosing automated material handling systems (AMHS) for new wafer fab rication facilities. While this approach is just a simulation, it prov ides more valuable data on possible real performance than just making decisions from comparative lists of specifications. With AMHS adding $ 75-100 million in hardware, software, and infrastructure to the cost o f a new fab, but being essential for emerging 300-mm fabs, use of simu lation is crucially important to help sort through management, enginee ring, and production questions. Simulation provides the ability to com pare fab automation designs through detailed analyses of system compon ent layouts, system performance, capacity constraints, wafer run rates , operational requirements, downtime parameters, automation needs, and the integration of all these elements.