Measurement of the electron energy distribution function in an argon radio-frequency discharge in the gamma mode

Authors
Deegan, CM Goss, JP Vender, D Hopkins, MB
Citation
Cm. Deegan et al., Measurement of the electron energy distribution function in an argon radio-frequency discharge in the gamma mode, APPL PHYS L, 74(14), 1999, pp. 1969-1971
Citations number
12
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS LETTERS
ISSN journal
00036951 → ACNP
Volume
74
Issue
14
Year of publication
1999
Pages
1969 - 1971
Database
ISI
SICI code
0003-6951(19990405)74:14<1969:MOTEED>2.0.ZU;2-W
Abstract
The alpha-gamma transition in an argon radio-frequency discharge has been m easured using Langmuir probes and a current-voltage monitor. At two pressur es, bi-Maxwellian electron energy distribution functions were measured in t he gamma mode. Increasing the gas pressure results in a decrease in the hig h-energy component of the electron energy distribution function. A transiti on region in the current-voltage characteristic is also observed. (C) 1999 American Institute of Physics. [S0003-6951(99)04414-9].