Surface defect states are generally not directly accessable experimentally.
In standard photoemission this is because of their low densities which are
several orders of magnitude lower than intrinsic states. On semiconductor
surfaces, however, they may induce band bending which is changing character
istically upon bias light intensity and temperature variation. We show that
fitting surface photovoltage measured by photoemission to calculations con
sidering high bias light levels and finite electric fields in the space cha
rge layer explicitly allow for a quantitative determination of surface defe
ct densities and the associated energy levels. The results obtained for the
defect densities were corroborated by scanning tunneling microscopy invest
igations. For the covalent and layered semiconductor surfaces GaAs(110) and
WSe2:Rb serving as model systems, we show the wide applicability and relia
bility of this technique. (C) 1999 American Institute of Physics. [S0003-69
51(99)00513-6].