Magnetic properties of carbonitride films elaborated by plasma enhanced chemical vapor deposition

Several amorphous carbonitride films have been elaborated by plasma enhance d chemical vapor deposition. A radio frequency discharge has been used unde r standard conditions with different graphitic nitrogenated compounds. It i s shown that the influence of molecular precursor is important concerning i n particular the magnetic properties. The films issued from pyrrole and cya nuric chloride exhibit a large number of spins. However, in contrast to pre vious works, no cooperative magnetic effects have been found at very low te mperature. Finally, it is argued that a further heat-treatment at 1000 degr ees C of a film, prepared from cyanuric chloride, seems to lead to a crysta lline phase of C3N4. (C) 1999 Elsevier Science Ltd. All rights reserved.