Micropatterning of ceramics by slip pressing

Slip pressing is a modified pressure assisted slip casting method for the f abrication of ceramic microcomponents. By this method a ceramic slip is con solidated in a special compaction tool containing a nonporous mould. A poro us piston which at the same time serves as a filter, enables the liquid to be pressed out and the remaining powder to be compacted simultanously. Thus the liquid transport is not performed through the mould and a nonporous mo uld can be used, as suited porous moulds for microcomponents are not availa ble. Al2O3 slips and PMMA moulds were used in this process for the micropat terning of column and nozzles structures with a size of some ten microns an d aspect ratios of more than 20. (C) 1999 Elsevier Science Limited and Tech na S.r.l. All rights reserved.