An efficient method is presented to model the transient characteristics of
distributed resistor-capacitor of ULSI multilevel interconnections on compl
ex topography, in which the reformulation of the boundary-element method (B
EM) and the Pade-via-Lanczos (PVL) algorithm associated with multilayer Gre
en's function can avoid the redundant works on both volume mesh and transie
nt analysis associated with the finite-difference method. An adaptive multi
layer Green's function is adopted to investigate several cases that have re
vealed interesting physical mechanisms in charge transfer between conductor
s on multilayer topography. To improve the timing analysis efficiency of th
e finite-difference method, the dominant poles are obtained by introducing
the PVL algorithm for model-ol der reduction. Hence, it is easy to calculat
e the transient characteristics of both parallel conductors and complicated
configurations such as crossing lines, corners, contacts, multilayers, and
their combinations.