G. Verzellesi et al., On the accuracy of generation lifetime measurement in high-resistivity silicon using PN gated diodes, IEEE DEVICE, 46(4), 1999, pp. 817-820
We show that in high-resistivity silicon bulk generation lifetime and surfa
ce generation velocity can not be measured with acceptable accuracy using a
single gated diode, unless the gate length is suitably tailored. The accur
acy with which bulk generation lifetime can be evaluated is, in particular,
limited by nonidealities, contributing extra components to the gated-diode
current, which are not accounted for in the standard extraction procedure.