Preparation and characterization of lead zirconate titanate heterolayered thin films on Pt/Ti/SiO2/Si substrate by sol-gel method

Ferroelectric Pb(ZrxTi1-x)O-3 (PZT; x = 0.2, 0.8) heterolayered thin films were fabricated by the spin-coating method on the Pt electrode alternately using PZT(20/80) and PZT(80/20) metal alkoxide solutions. All PZT heterolay ered films show dense structure without the presence of the rosette structu re. The lower PZT layers provide the nucleation site for the formation of a perovskite phase in the upper PZT films. Pb-deficient pyrochlore phase was formed at PZT/Pt interface hue to diffusion of the Pb element into the Pt bottom electrode. The relative dielectric constant and dielectric loss of t he six coated PZT heterolayered film were approximately 1385 and 3.3% at 1 kHz, respectively.