InP islands have been grown on LaF3/InP(111) heterostructures by molecular
beam epitaxy. The InP islands have been imaged by atomic force microscopy a
nd scanning electron microscopy and are observed to be faceted with three-f
old symmetry as expected for (111) orientation High-resolution X-ray diffra
ction shows that the LaF3 substrate layer is a high quality epitaxial film.
A small broadening of the InP substrate diffraction peak is interpreted as
being due to inhomogeneous strain associated with the InP islands and diff
erential thermal contraction of the LaF3 film during cooling.