PHOTOLUMINESCENCE OF ANISOTROPICALLY ETCHED SILICON

Authors
GORBACH TY RUDKO GY SMERTENKO PS SVECHNIKOV SV VALAKH MY
Citation
Ty. Gorbach et al., PHOTOLUMINESCENCE OF ANISOTROPICALLY ETCHED SILICON, Applied physics. A, Solids and surfaces, 58(2), 1994, pp. 183-186
Citations number
16
Categorie Soggetti
Physics, Applied
Journal title
Applied physics. A, Solids and surfaces → ACNP
ISSN journal
07217250
Volume
58
Issue
2
Year of publication
1994
Pages
183 - 186
Database
ISI
SICI code
0721-7250(1994)58:2<183:POAES>2.0.ZU;2-0
Abstract
Visible room-temperature luminescence of Anisotropically Chemically Et ched (ACE) silicon under ''spontaneous'' chemical surface modification in HNO3:HF solution is reported. The material is investigated by SEM, AES, IR transmission and Raman scattering methods.