H. Isobe et K. Kaneko, Porous silica particles prepared from silicon tetrachloride using ultrasonic spray method, J COLL I SC, 212(2), 1999, pp. 234-241
Silica particles having the median diameter of 1 to 3 mu m were prepared fr
om silicon tetrachloride vapor by a reaction with water droplets using the
ultrasonic spray method. The particle sizes of silicas were controlled by c
hanging the composition of silicon tetrachloride and water. These silica pa
rticles had microporous structures from nitrogen and water adsorption measu
rements. The microporous and mesoporous particles were prepared from the re
action of water droplets including sodium and potassium carbonates with sil
icon tetrachloride vapor. (C) 1999 Academic Press.