Micromechanical RF filters excited by the Lorentz force

Authors
Greywall, DS
Citation
Ds. Greywall, Micromechanical RF filters excited by the Lorentz force, J MICROM M, 9(1), 1999, pp. 78-84
Citations number
6
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
ISSN journal
09601317 → ACNP
Volume
9
Issue
1
Year of publication
1999
Pages
78 - 84
Database
ISI
SICI code
0960-1317(199903)9:1<78:MRFEBT>2.0.ZU;2-T
Abstract
A design is proposed for a high-Q rf band-pass filter whose active element is a micromachined mechanical resonator. The device is located in a large m agnetic field created by a miniature permanent magnet and can be configured to operate at frequencies extending into the low GHz regime.