Mechanical properties of amorphous carbon coatings prepared using plasma assisted chemical vapor deposition

Amorphous carbon/metal carbide gradient coatings were prepared by a combina tion of plasma assisted chemical vapor deposition and rf sputtering techniq ues. The structure of the coatings was characterized by scanning electron m icroscopy and transmission electron diffraction. A scratch tester measured the adhesion of the coatings. The depth-sensing indentation technique was u sed to measure the hardness, elastic and plastic properties of the amorphou s carbon coatings. The measured results revealed that the amorphous carbon coatings with metal carbide interlayer have a uniform structure and better mechanical properties than that of pure amorphous carbon coatings. (C) 1999 Elsevier Science S.A. All rights reserved.