CAPILLARY ELECTROPHORESIS METHODS FOR THE TRACE CATION ANALYSIS OF SEMICONDUCTOR GRADES OF HYDROGEN-PEROXIDE

Method development and applications of capillary electrophoresis to th e analysis of cations in highest purity grades of hydrogen peroxide wh ich are used for semiconductor processing are discussed. Indirect UV d etection in conjunction with electromigration sampling provides a suff icient sensitivity for measurements of low ppb (v/v) levers of contami nants. In contrast to hydrostatic sample introduction, the range of si gnal vs. concentration proportionality is limited with electromigratio n sampling. However, meaningful calibration plots can be obtained over the range of 1 to 35 ppb. Examples of electropherograms are presented for two different samples of semiconductor grade hydrogen peroxide. A lso given are estimates of detection limits for cations found in analy zed samples.