Measurements of the loss probability of nitrogen atoms versus temperature on various surfaces

Citation
T. Belmonte et al., Measurements of the loss probability of nitrogen atoms versus temperature on various surfaces, THIN SOL FI, 341(1-2), 1999, pp. 27-30
Citations number
22
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
341
Issue
1-2
Year of publication
1999
Pages
27 - 30
Database
ISI
SICI code
0040-6090(19990312)341:1-2<27:MOTLPO>2.0.ZU;2-J
Abstract
The loss probability gamma(N) of nitrogen atoms is measured versus the temp erature on different surfaces by a method based on optical emission spectro scopy measurements. In a cylindrical quartz tube, a late Ar-N-2 post-discha rge is used. Emission of the first positive system is observed in a zone th at precedes a heated zone and in another zone that follows it. Each observe d zone is at room temperature. Indeed, in these conditions, nitrogen atoms titration by NO permits the attainment of the absolute value of the N densi ty. This method can give the dependence of the loss probability of nitrogen atoms versus the temperature. The very simple geometry used here enables t he use of foils made of any material introduced in the heated zone of the r eactor. Therefore, different wall materials can be easily studied. Calculat ion of the loss probability gamma(N) requires a 2D hydrodynamic. thermal an d kinetics modelling. It was developed and it included, diffusion to the wa lls, temperature gradients, volume and surface nitrogen atom consumptions. The first results obtained on quartz show that N atoms recombine according to an Eley-Rideal mechanism and gamma (N/quartz) = 9.3 x 10(-5) exp(-3700/R T). The loss probability of the N atoms was also determined at 300 K on iro n foils. The weak value obtained gamma(N/iron) = 6.7 x 10(-4) is probably d ue to the nitriding of the metal. (C) 1999 Elsevier Science S.A. All rights reserved.