The formation and properties of silicon, germanium, carbon and carbon-silic
on magnetron sputtered thin films are described. The influence of various e
lements (e.g. B, Au, Sb, V and Ta) on thermosensitive thin film properties
have been studied. The dopants were introduced directly from a mosaic circu
lar target surface with separated zones of individual components in radial
symmetry. It has been found that the selection of appropriate material comp
ositions and sputtering conditions allow adjustment of the film resistivity
rho, the temperature coefficient of resistance TCR and Seebeck effect Q(th
). (C) 1999 Elsevier Science Ltd. All rights reserved.