Dynamic flow method UHV standard apparatus developed by LIP

Authors
Li, WK Liu, Q Lu, SL Zhang, DX Ma, SL Hu, W Meng, QH Li, DT Li, ZH Gong, YL Meng, Y Wen, XH Tian, DX Li, L
Citation
Wk. Li et al., Dynamic flow method UHV standard apparatus developed by LIP, VACUUM, 53(1-2), 1999, pp. 167-171
Citations number
3
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
VACUUM
ISSN journal
0042207X → ACNP
Volume
53
Issue
1-2
Year of publication
1999
Pages
167 - 171
Database
ISI
SICI code
0042-207X(199905)53:1-2<167:DFMUSA>2.0.ZU;2-E
Abstract
The dynamic flow method UHV standard apparatus developed by LIP is an absol ute vacuum standard for vacuum gauge calibration. It is composed of a calib ration system, a flowmeter and a pumping system. The calibration system is a four-sphere structure, and the diameter of the calibration chamber is 500 mm, the ultimate vacuum is 6.5 x 10(-9) Pa, the calibration range is from 10(-2) to 10(-7) Pa and the uncertainty amounts to 3% from 10(-2) to 10(-6) Pa and increases to 10% in 10(-7) Pa. (C) 1999 Elsevier Science Ltd. All r ights reserved.