An apparatus controlled by computer for vacuum gauge calibration

Citation
Dt. Li et al., An apparatus controlled by computer for vacuum gauge calibration, VACUUM, 53(1-2), 1999, pp. 173-176
Citations number
4
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
VACUUM
ISSN journal
0042207X → ACNP
Volume
53
Issue
1-2
Year of publication
1999
Pages
173 - 176
Database
ISI
SICI code
0042-207X(199905)53:1-2<173:AACBCF>2.0.ZU;2-R
Abstract
The apparatus controlled by computer for vacuum gauge calibration, with dyn amic comparison, static expansion and static comparison methods, can carry out calibration of vacuum gauges in the range from 10(-4) to 10(5) Pa. Acco rding to actual requirement, different reference standards and calibration methods can be chosen. It was constructed with metal and the calibration ch amber is spherical. A programmable logical controller can automatically rea lize logical control of valves, pumps and vacuum gauges to increase work ef ficiency. The computer software designed for use under Windows has a good i nterface. In addition, to make operation easy and convenient, dynamic data exchange technique and database management technique are used to realize au tomatic data collection and data processing. Six gauges may be calibrated a t the same time, therefore, it is optimal for routine use. (C) 1999 Elsevie r Science Ltd. All rights reserved.