Measurements of particulate contamination and migration under vacuum usinga large sensitive area particle counter

Authors
Jimenez, JM Dorier, JL Hilleret, N
Citation
Jm. Jimenez et al., Measurements of particulate contamination and migration under vacuum usinga large sensitive area particle counter, VACUUM, 53(1-2), 1999, pp. 329-333
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
VACUUM
ISSN journal
0042207X → ACNP
Volume
53
Issue
1-2
Year of publication
1999
Pages
329 - 333
Database
ISI
SICI code
0042-207X(199905)53:1-2<329:MOPCAM>2.0.ZU;2-J
Abstract
A large area (50 cm(2)) particle counter working under vacuum (10(-7) mbar) has been developed at CERN and applied to measurements of particles releas ed by several vacuum components like valves, gauges and ion pumps. This tec hnique has also been applied to study the migration of particles under vacu um with and without an applied electric held. This counter, which is based on the scattering of laser light by particles, is described with comments o n the technical choices. The results of the contamination released by vacuu m components and the effects of an electric field will be presented. (C) 19 99 Elsevier Science Ltd. All rights reserved.