In this paper, plasma parameters of a DC unbalanced planar magnetron applie
d for Mo/C:H composite film deposition are described in connection with the
basic film properties. Langmuir probe (of a V shape) heated to a dark red
was used for V A characteristic measurements in Ar and in a mixture of Ar a
nd n-hexane as working gases. Floating and plasma potentials, electron temp
erature and concentrations were measured. Using a cold plane Langmuir elect
rostatic probe in the form of a small disc the radial distribution of a pla
sma potential and saturated ion current to the probe were determined. Using
a thermocouple probe spot welded to the disc probe a heat load in the subs
trate plane was investigated. Also the dependence of the floating potential
on pressure of the working gas and substrate temperature on the power deli
vered to the discharge were found. Finally, radial distribution of the comp
osite film resistance per square and film thickness were measured and are d
iscussed in connection with the measured plasma parameters. (C) 1999 Elsevi
er Science Ltd. All rights reserved.