Accurate prediction of internal leaks in stationary dry Roots vacuum pumps

Citation
Lc. Valdes et al., Accurate prediction of internal leaks in stationary dry Roots vacuum pumps, VACUUM, 52(4), 1999, pp. 451-459
Citations number
7
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
VACUUM
ISSN journal
0042207X → ACNP
Volume
52
Issue
4
Year of publication
1999
Pages
451 - 459
Database
ISI
SICI code
0042-207X(199904)52:4<451:APOILI>2.0.ZU;2-A
Abstract
There exists a calculating method for internal leaks in dry Roots vacuum pu mps. It rests upon the semi-empirical Knudsen-Dong law (Knudsen M, Ann Phys 1909;28:75; Dong W, PhD thesis, Contract no. W-7405-eng-48, University of California, 1956) describing steady rarefied gas flows in the three well-kn own regimes of flow; the only data input is the geometric contour of the st ator and the rotors, and the pressure operating conditions. Using readings taken from a stationary dry Roots pump, it is checked that this calculating method is capable of predicting the conductance of each of the clearances to a few percent, on a pressure range widely covering the transient flow re gime. (C) 1999 Elsevier Science Ltd. All rights reserved.