HIGH-Q SAW FILTER AND SUBMICRON PROCESS TECHNOLOGY FOR TIMING EXTRACTION IN HIGH BIT-RATE OPTICAL COMMUNICATIONS-SYSTEM

A new surface acoustic wave (SAW) filter configuration that consists o f 3 lambda/8-wide meander-type electrodes and 3 lambda/8-wide excitati on electrodes on ST-cut Quartz was designed for use in a 2.5-Gb/s opti cal communications system. New submicron process techniques using the phase shifting method as wed as several types of resist were investiga ted to fabricate this filter. It had an insertion loss of less than 14 dB and a Q of about 700, and satisfied all required system specificat ions over a temperature range from 0 to 60 degrees C.