SOURCE OF A DENSE METAL PLASMA

Authors
ANPILOV AM BARKHUDAROV EM BEREZHETSKAYA NK KOPEV VA KOSSYI IA MALYKH NI MATOSSIAN J TAKTAKISHVILI MI TEREKHIN VE
Citation
Am. Anpilov et al., SOURCE OF A DENSE METAL PLASMA, Plasma sources science & technology, 7(2), 1998, pp. 141-148
Citations number
17
Categorie Soggetti
Phsycs, Fluid & Plasmas
Journal title
Plasma sources science & technology → ACNP
ISSN journal
09630252
Volume
7
Issue
2
Year of publication
1998
Pages
141 - 148
Database
ISI
SICI code
0963-0252(1998)7:2<141:SOADMP>2.0.ZU;2-0
Abstract
This paper presents results of experimental investigation of a low-thr eshold slipping surface discharge as a pulsed source of a dense metal plasma. The density of the plasma was measured by application of Langm uir probes and a microwave interferometer. Mass and energy ion spectra were determined using the ion electrostatic and magnetic analyser. Pr eliminary results concerning a new metal plasma source application for TiN thin-film deposition are discussed.