GOLD, SELF-, AND DOPANT DIFFUSION IN SILICON

In the subject publication, Mathiot casts doubt upon our Monte Carlo s imulations of Au diffusion in Si with the kick-out mechanism. We argue that our simulations were correct. In addition, we observe that Mathi ot's treatment of diffusion lacks information on boundary conditions w hich is necessary for accurate modeling. Mathiot's model also ignores the possible existence of vacancy clusters. Mathiot concluded that dif fusion of Au in Si is dominated by the kick-out mechanism. We argue th at this conclusion is unjustified.