2-DIMENSIONAL MAPPING OF ELECTRIC-FIELD VECTOR BY ELECTROOPTIC PROBER

A novel technique for two-dimensional (2D) electric-field (E-field) ve ctor measurement is described. Laser beams with different propagation paths in an electro-optic (EO) crystal are used to resolve the E-field direction on the wafer. A lithium tantalate (LiTaO3) crystal with a t hickness of 20 mu m and a bottom area of 200 mu m X 200 mu m is used f or the experiment. A sensitivity of 1.8 V/cm.root Hz is achieved for t he E-field strength measurement. The field direction can be identified with afield strength larger than 25 V/cm, and the root-mean-square er ror is 1.1 degrees. (C) 1998 Elsevier Science B.V.