THE USE OF RELIABILITY FACTORS IN ANALYZING POWDER PATTERNS IN PT-SI SPUTTERING TARGETS AND SUBSEQUENT FILMS

Authors
RAHMAN A LOWE WP BATES CW
Citation
A. Rahman et al., THE USE OF RELIABILITY FACTORS IN ANALYZING POWDER PATTERNS IN PT-SI SPUTTERING TARGETS AND SUBSEQUENT FILMS, Journal of materials research, 13(6), 1998, pp. 1517-1521
Citations number
10
Categorie Soggetti
Material Science
Journal title
Journal of materials research → ACNP
ISSN journal
08842914
Volume
13
Issue
6
Year of publication
1998
Pages
1517 - 1521
Database
ISI
SICI code
0884-2914(1998)13:6<1517:TUORFI>2.0.ZU;2-6
Abstract
X-ray powder diffraction was used to characterize a Pt-Si sputtering t arget and subsequent films. The powder patterns of each sample indicat ed lines due to diffraction from different phases. We have initiated a preliminary study through which we have analyzed and characterized th ese films. The results presented for these samples corroborate with re sults observed for this system in the planar configuration.