L. Sangaletti et al., W-TI-O LAYERS FOR GAS-SENSING APPLICATIONS - STRUCTURE, MORPHOLOGY, AND ELECTRICAL-PROPERTIES, Journal of materials research, 13(6), 1998, pp. 1568-1575
The kinetics of phase transitions and phase segregation induced by ann
ealing temperature on the Ti-W-O gas-sensing layer was studied by x-ra
y diffraction, Raman spectroscopy, and scanning electron microscopy, T
he main goal was to identify, on the basis of kinetics studies, struct
urally stable Ti-WO3 thin film phases and compare their response to po
lluting gases in order to determine possible correlations between stru
ctural and electrical properties of the sensing layers.