SIMPLE TECHNIQUE FOR REPLICATION OF MICRO-OPTICAL ELEMENTS

A simple technique for the replication of micro-optical elements is pr esented. Elastomeric material is used to realize a negative mold of th e original optical element and UV-curing adhesive is used to make the replicated copy. Replicated elements, such as refractive and diffracti ve micro-optical elements, are produced. The refractive microlenses ha ve a diameter of 970 mu m and a height of 79 mu m and the diffractive element is a multilevel blazed grating with a period of 64 mu m. The c haracteristics of the replicated elements are measured using different methods. The deviation from a sphere of the original and the replicat ed refractive microlenses is 0.13 lambda and 0.12 lambda root mean squ are (rms), respectively. The replicated multilevel blazed grating has a diffraction efficiency of over 80%. An alternative method for realiz ing phenoconcave microlenses from a planoconvex master is also present ed. (C) 1998 Society of Photo-Optical Instrumentation Engineers. [S009 1-3286(98)01106-4].