SIMULATION OF MICRO-OPTICAL ARRAY SYSTEMS WITH RAYTRACE

The optical analysis and design program RAYTRACE, which was developed at our institute, enables the simulation of micro-optical systems cont aining arrays of microlenses or other optical components. The most imp ortant features of the program are briefly described to show its broad application areas. A special simulation example showing the spot diag ram and the intensity distribution in the focal plane of a simple Shac k-Hartmann sensor with a diffractive microlens array for an incident a spherical wave is given. (C) 1998 Society of Photo-Optical Instrumenta tion Engineers. [S0091-3286(98)01906-0].