MODELING AND SIMULATION OF A SILICON BEAM RESONATOR ATTACHED TO A SQUARE DIAPHRAGM

Based on the Finite Element Method (FEM) model of a practical silicon beam resonator attached to a square diaphragm used for measuring press ure, this paper presents two location error models which exist in actu al fabrication. We calculate, analyze and investigate the relationship between the basic natural frequency of the beam resonator and the mea sured pressure for two error models by making use of FEM. In order to improve the exchangeability of the sensor, it is necessary to monitor the processing accuracy in x-and y-axes, and the reference angle relat ive to the ideal location within the positive stress range. It is also necessary to monitor the processing accuracy in the x-axis within the negative stress range, as the beam axial direction is along the x-asi s the square diaphragm.