Communication: The fabrication of arrays of Schottky diodes on p-type
silicon is described using a representative soft lithographic techniqu
e: micro-molding in capillaries (MIMIC). It is demonstrated that soft
lithography is compatible with multilayer fabrication of electronicall
y functional structures. The characteristics of the diodes were found
to be similar to those fabricated by photolithography. The advantages
and limitations of MIMIC are outlined, with particular attention being
paid to the degree of registration of features that can be achieved.