In the present paper, a new type of DC are plasma torch is disclosed.
The principles of the new magnetic and fluid dynamic controlled large
orifice long discharge tunnel plasma torch is discussed. Large area un
iformity is achieved through the externally applied magnetic field whi
ch stabilizes the are jet and the proper magnetic and fluid dynamic co
ntrol which guarantees the dynamic mixing of gases before impinging on
to the substrate. The 100 kW high power jet which is newly developed
based on the experience of the low power model is equipped with a Phi
120 mm orifice torch, and is capable of depositing diamond films over
a substrate area of Phi 110 mm at a growth rate as high as 40 mu m/h,
and can be operated in gas recycling mode, which allows 95% of the gas
es to be recycled. It is demonstrated that the new type DC plasma torc
h can be easily scaled-up to an even higher power jet. It is estimated
that even by the 100 kW jet, the cost for tool grade diamond films ca
n be as low as less than $4/carat. (C) 1998 Elsevier Science S.A.