COMPARISION OF FIELD ELECTRON-EMISSION FROM DLC FILMS PRODUCED BY 4 DIFFERENT DEPOSITION TECHNIQUES

Diamond-like carbon (DLC) films produced by ion beam, laser-arc, r.f.- plasma deposition and magnetron sputtering were characterized on the f ield electron emission properties (thresholds, hysteresis behaviour, s tability, homogeneity). The best samples showed electron emission at f ields of 4-20 V mu m(-1). Correlations between emission properties and film hardness. Raman spectra, optical band gap, sp(3)-bonded carbon c ontent and electroconductivity were found. A specially designed high v acuum scanning tunneling-field emission microscope was used for simult aneous mapping of film morphology, work function and local field emiss ion intensity. Correlations were observed between emission centres loc ation and work function minima. Factors that improve the field electro n emission from DLC films are discussed. (C) 1998 Elsevier Science S.A .