DEVELOPMENT OF A COBALT LIQUID ALLOY ION-SOURCE

Authors
HESSE E BISCHOFF L TEICHERT J
Citation
E. Hesse et al., DEVELOPMENT OF A COBALT LIQUID ALLOY ION-SOURCE, Journal of physics. D, Applied physics, 27(2), 1994, pp. 427-428
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Journal of physics. D, Applied physics → ACNP
ISSN journal
00223727
Volume
27
Issue
2
Year of publication
1994
Pages
427 - 428
Database
ISI
SICI code
0022-3727(1994)27:2<427:DOACLA>2.0.ZU;2-O
Abstract
A cobalt-neodymium liquid alloy ion source for applications in focused ion beam devices was developed and investigated. The performance and the main parameters of the ion source are presented.