DEPTH-SENSITIVE X-RAY-DIFFRACTION USING EXTREMELY ASYMMETRICAL REFLECTIONS BY VARIATION OF THE WAVELENGTH

Authors
GERHARD T FASCHINGER W LANDWEHR G
Citation
T. Gerhard et al., DEPTH-SENSITIVE X-RAY-DIFFRACTION USING EXTREMELY ASYMMETRICAL REFLECTIONS BY VARIATION OF THE WAVELENGTH, Semiconductor science and technology, 13(6), 1998, pp. 583-589
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Condensed Matter","Material Science
Journal title
Semiconductor science and technology → ACNP
ISSN journal
02681242
Volume
13
Issue
6
Year of publication
1998
Pages
583 - 589
Database
ISI
SICI code
0268-1242(1998)13:6<583:DXUEAR>2.0.ZU;2-0
Abstract
We report a new method for depth-sensitive x-ray diffraction, which is based on high-resolution measurements of extremely asymmetrical Bragg reflections for varying x-ray wavelengths. This method allows a varia tion of the information depth between 0.1 mu m and several mu m and ca n be used to determine the sequence of epitaxial layers in complicated multilayer structures. In addition, the measurement of depth-sensitiv e reciprocal space maps allows a measurement of strain and mosaicity a s a function of depth.