LOW-LOSS SUBSTRATE-REMOVED (SURE) OPTICAL WAVE-GUIDES IN GAAS-ALGAAS EPITAXIAL LAYERS EMBEDDED IN ORGANIC POLYMERS

Low-loss single-mode semiconductor rib optical waveguides fabricated i n GaAs-AlGaAs epitaxial layers are removed from GaAs substrates and bo nded to transfer substrates using a benzocyclobutene organic polymer, Optical quality facets were obtained by cleaving through the transfer substrate. An average propagation loss of 0.39 and 0.48 dB/cm at 1.55 mu m wavelength for TE and TM polarizations, respectively, were measur ed. This was on average 0.05 dB/cm greater than control guides fabrica ted in GaAs-AlGaAs epilayers on GaAs substrates with air as the top cl adding, This demonstrates the feasibility of a process enabling semico nductor polymer integration and processing both sides of an epitaxial layer.