SURFACE MICROMACHINED INTEGRATED-OPTIC POLARIZATION BEAM SPLITTER

An integrated polarization beam splitting system composed of one binar y phase Fresnel collimating lens and one polarization beam splitter (P BS) has been realized on a single Si chip using a commercially availab le foundry polysilicon surface micromachining process [Multi-User Mems ProcesS, or (MUMPS)] at Mems Center at North Carolina (MCNC). The pol arization extinction ratios of 10 dB for the transmitted light and ove r 20 dB for the reflected light have been achieved. The whole system i s prealigned through computer-aided design on a Si substrate and is li fted up perpendicular to the substrate after structure release. This s ystem opens opportunities for various applications where the light pol arization states could be utilized.