S. Mukherjee et al., CALCULATION OF TEMPERATURE EFFECTS ON THE EQUILIBRIUM CRYSTAL SHAPE OF SI NEAR (100), Physical review. B, Condensed matter, 49(3), 1994, pp. 1919-1927
We present a statistical model of step meandering on small-miscut vici
nal Si(100) surfaces, generalized to treat arbitrary azimuth. The mode
l is solved using a transfer-matrix technique and the free energy of t
he vicinal Si(100) surface is calculated. From the free energy the equ
ilibrium crystal shape is derived at various temperatures. The results
are compared with existing experimental data.