DIAMOND DEPOSITION ON TITANIUM AND IRON SUBSTRATES PRETREATED IN N-2-C2H2 PLASMA

Citation
T. Sato et al., DIAMOND DEPOSITION ON TITANIUM AND IRON SUBSTRATES PRETREATED IN N-2-C2H2 PLASMA, Thin solid films, 316(1-2), 1998, pp. 29-34
Citations number
5
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
ISSN journal
00406090
Volume
316
Issue
1-2
Year of publication
1998
Pages
29 - 34
Database
ISI
SICI code
0040-6090(1998)316:1-2<29:DDOTAI>2.0.ZU;2-6
Abstract
Diamond deposition on pure titanium and iron substrates pretreated in N-2-C2H2 plasma without any mechanical surface pretreatment was studie d. High quality diamond film was deposited on such pretreated substrat es by CVD using combustion flame. After the pretreatment, a C-C bond w as detected on the modified substrate, and graphitic carbon formation on the substrate was suppressed during diamond deposition. The surface of the modified substrate also became slightly rough, so the anchor e ffect between the film and the substrate was expected. This suppressio n and the anchor effect would indicate a remarkable improvement of adh esion of the film to the substrate. In particular, the diamond deposit ion process on the plasma-pretreated iron substrate was compared in de tail with that on the substrate scratched with diamond powder. It was found that diamond was directly grown from the carbonitrided surface l ayer of the plasma pretreated substrate. (C) 1998 Elsevier Science S.A .