MINIATURE LIQUID-CRYSTAL-ON-SILICON DISPLAY ASSEMBLY

A novel integrated assembly process for miniature liquid-crystal-on-si licon displays using photodefinable benzocyclobutene resin is presente d. Spin coating speed defines the cell gap, photolithography defines t he cell perimeter and spacers, and thermocompression bonding provides the adhesion. The photodefined adhesive spacers provide thin liquid-cr ystal cell gap control (<2.5 mu m) with excellent uniformity (+/-100 n m) for glass-on-glass and glass-on-silicon assemblies. The resin is co mpatible with common liquid-crystal alignment films and exhibits a bon ding shear strength of 22 +/- 3.2 MPa The assembly process flow and ch aracterization of demonstration devices are described. (C) 1998 Optica l Society of America.